How It Works

The MEMS valve operates using electrostatic holding forces that are created by providing any voltage between 4 and 24 volts VDC to the valve. The MEMS devices open and/or close in microseconds, much faster than conventional solenoid based technology. The MEMS device, when closed, provides an air-tight seal without the need for conventional rubber or metal seals that “wear” over time, creating contamination. The valve also does not require springs to shift a spool or poppet.

Patent(s) Pending